Wafer Handling Robots

Our wafer handling robots are designed to meet the high standards of the fast developing wafer handling equipment and technologies. The Diamond series atmospheric robots represent a significant engineering advancement, combining superior performance with high throughput and precision of motion, achieving exceptional accuracy and lifetime reliability.

Diamond H1

The cost-effective Atmospheric Wafer Handling Robot for efficient work.

Diamond H1

Diamond H3

The most popular Atmospheric Wafer Handler with all of the standard features included.

Diamond H3

Diamond H4

The dual-arm, atmospheric Wafer Handler for high performance, heavy duty, and specialized work.

Diamond H4

Diamond H5

For the latest in vacuum transport technology and load lock applications. These Wafer Handling Robots are the most cost effective solutions in the marketplace and can be built to fit customer specific requirements.

Diamond H5

Diamond E5

Elevator for loading and unloading wafers into vacuum processing tools.

Diamond E5

Linear Tracks

A one axis track for mobilizing the robot either horizontally or vertically. It comes in varying lengths to meet customer requirements.

Linear Tracks

Diamond EFEM

(Equipment Front End Module) A self-contained mini-environment designed to meet SEMI and ISO specifications.

Diamond EFEM

AXM 100

industry-standard ATM 100 series of clean-room-compatible wafer handling robots. The low-inertia design allows rapid motion with no sensitivity loss within the closed-loop DC servo system. Compact dimensions enable the robot to fit into smaller footprints.

AXM 100

AXM 400

Atmospheric Bottom Mount (ABM)-400 and Atmospheric Top Mount (ATM)-400 Class 1 cleanroom compatible wafer handling robots are designed to handle wafers up to 300mm in diameter.

AXM 400

DBM

Designed specifically for the simultaneous handling of two wafers, this robot features two independent Radial axes. Two integral end-effectors allow a pre-aligned wafer to be exchanged with a processed wafer 25% faster than a dual paddle robot.

DBM

PRE 200

Wafer Pre-Aligner combines a high-resolution optical system with high-precision mechanics to yield great overall performance.

PRE 200

PRE 300

The PRE-300 Wafer Pre-Aligner combines high-resolution optical sensing with high-precision mechanics to yield great overall performance.

PRE 300

Tracks

The TRA series linear track, featuring a unique modular design can be easily integrated into any application where parallel 300mm load ports, 200mm SMIF modules, or process chambers are configured.

Tracks