EQUIPE DBM Series Dual-Arm Robot

General Specifications:

Payload (each arm) 1 lb. (.45kg)

Wafer Size 200mm-300mm (Standard)

Weight 90 lbs. (41kg)

Utilities Required Vacuum, 18-24 inches Hg Input Voltage, 100/120/220/240 VAC, 50/60 Hz.

Throughput ≤ 3 seconds / per wafer swaps Mounting Specifications:

Mounting Holes 4 x .375” thru holes Mounting Holes Spacing 11.75"

End Effector Mounting 4 x 6-32, 1.00” spacing Dead Zone N/A

Axis Repeatability Speed Motion range (2406) Motion range (2407)
T + 0.01 360°/sec 360° 360°
R < ± 0.002" 24 inch/sec 11.68” 14.50”
Z ± 0.001" 12 inch/sec 12.96" 12.96"