EQUIPE AXM 400

General Specifications:

Payload 404 405 407 407B 407C

            1 lb. 1 lb. 1 lb. 1.5 lbs 4 lbs

Droop< 0.020” for rated payloads Z

Drop< .010” in the event of a servo off with brake

Noise Shall not exceed 72dB at 400 to 20000 Hz with 1001-0430 lead screw Substrate sensors

Vacuum Throughput< 4 seconds / wafer / pick and place

Cleanliness Class 1 compatible

Weight 60 lbs.

Vacuum required 18-24 inches Hg

Power required 100-240 VAC, 50/60 Hz

MTBF 75,000 Hrs.

Mounting Specifications: Robot Hole Diameter 11.500”

Robot Bolt Pattern 3 x 0.25” thru on dia. 12.350"

End Effector 4 x 4-40 on dia. 1.390" (404, 405, 407) 4 x 6-32 on dia. 2.000” (407B, 407C) Dead Zone 25° Dead Zone

Axis Range of Motion Repeatability(Typical) Speed(Typical)
T 335° ± 0.02° @3 σ 360°/sec
R 2 x (4.45,” 5.25” or 7.20”) ± 0.002" @3 σ 24 inches/sec
Z 13” ± 0.002" @3 σ 10 inches/sec