EQUIPE AXM 100

General Specifications:

Payload: 1 lb.

Substrate Sensors: Vacuum, Laser Cassette Mapping Optional

Cleanliness: Class 1 (with fan Option)

Weight: ATM 100, 28 lbs.

Utilities Required: Vacuum 18-24 inches Hg, Power 100 - 240 VAC, 50/60 Hz

Throughput: < 4 seconds / wafer / pick and place (transfer)

MTBF: 75,000 Hrs.

 

Mounting Specifications:

Robot Hole Diameter: 8.500"

Robot Bolt Pattern: 3x1/4-20 on dia. 9.000"

End Effector: 4x4-40 on dia. 1.390"

Dead Zone: 25° Dead Zone

Canister: Minimum space required: 16.500" Canister diameter: 8.000"

Axis Range of Motion Repeatability(3 Sigma) Speed
T 335° ± 0.02° 720°/sec
R 2 x (4.45", 5.25" or 7.2") ± 0.002" 24 inches/sec
Z 7"ATM-100 ± 0.002" 12 inches/sec