Diamond EFEM (Equipment Front End Module)
General Info
The Diamond EFEM is a self-contained mini-environment that complies with SEMI and ISO standards. It is compatible with many kinds of semiconductor processing equipment and back-end systems. The Lead Port is modular and can seamlessly integrate to the OEM process tools. Diamond EFEMs are built to customer specification to meet specific system and layout requirements.
Specifications
| Dimensions*: | Height: 65" (1650 mm) Width: 50" (1270 mm) Depth: 44.22" (1125 mm) |
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| Power: | 110-240V (AC) Minimum of 3.0kVA capacity 50/60 Hz 1-phase |
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| Vacuum: | Load Port: 10 L/min at 375 mmHg (21ft3/hr at 14.77" Hg) Robot: 10 L/min at 635 mmHg (21 ft3/hr at 25" Hg) Prealigner: 304.80 mmHg (12" Hg) |
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| Compressed air (input) | Load Port: Min. 60 psi, Max. 145 psi (relative) oil-free, purified >5 µm Consumption: <1 m3/h for 10 cycles/hour Connection: One-touch fitting for ¼" tubing Robot: None Required |
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| Ambient Conditions: | Temperature: Operation: +15 to +25°C (58 to 77°F) Transport: -25 to +55°C (-13 to 181°F) Humidity: Operation: 10% to 95% relative humidity Transport: 5% to 95% relative humidity |
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| Cleanliness: | ISO Class 1 | ||||||||||||||||||||||||
| Communication: | RS232 or TCP/IP | ||||||||||||||||||||||||
| Compliance: |
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*Dimensions vary depending on customer's order
