Diamond EFEM (Equipment Front End Module)

General Info

The Diamond EFEM is a self-contained mini-environment that complies with SEMI and ISO standards. It is compatible with many kinds of semiconductor processing equipment and back-end systems. The Lead Port is modular and can seamlessly integrate to the OEM process tools. Diamond EFEMs are built to customer specification to meet specific system and layout requirements.

Specifications

Dimensions*:

Height: 65" (1650 mm)

Width: 50" (1270 mm)

Depth: 44.22" (1125 mm)

Power:

110-240V (AC)

Minimum of 3.0kVA capacity

50/60 Hz

1-phase

Vacuum:

Load Port: 10 L/min at 375 mmHg (21ft3/hr at 14.77" Hg)

Robot: 10 L/min at 635 mmHg (21 ft3/hr at 25" Hg)

Prealigner: 304.80 mmHg (12" Hg)

Compressed air (input)

Load Port: Min. 60 psi, Max. 145 psi (relative) oil-free, purified >5 µm

Consumption: <1 m3/h for 10 cycles/hour

Connection: One-touch fitting for ¼" tubing

Robot: None Required

Ambient Conditions:

Temperature:

Operation: +15 to +25°C (58 to 77°F)

Transport: -25 to +55°C (-13 to 181°F)

Humidity:

Operation: 10% to 95% relative humidity

Transport: 5% to 95% relative humidity

Cleanliness:

ISO Class 1

Communication:

RS232 or TCP/IP

Compliance:

E1.9	300 mm Cassette
E15.1	300 mm Tool Load Port
E47.1	300 mm Boxes and Pods
E57	Kinematic Couplings
E62	300 mm FIMS
E63	BOLTS Interface
E64	300 mm Cart Docking
E84	AMHS Parallel I/O Interface
E99	CIDRW
F47	Electrical Voltage Sag Standard
S2/S8/S14	Safety Guidelines
CE	EMC, LVD, and MD Directives

*Dimensions vary depending on customer's order