Diamond EFEM (Equipment Front End Module)

Diamond EFEM (Equipment Front End Module)

General Info

The Diamond EFEM is a self-contained mini-environment that complies with SEMI and ISO standards. It is compatible with many kinds of semiconductor processing equipment and back-end systems. The Lead Port is modular and can seamlessly integrate to the OEM process tools. Diamond EFEMs are built to customer specification to meet specific system and layout requirements.

Specifications

Dimensions*: Height: 65" (1650 mm)

Width: 50" (1270 mm)

Depth: 44.22" (1125 mm)
Power: 110-240V (AC)

Minimum of 3.0kVA capacity

50/60 Hz

1-phase
Vacuum: Load Port: 10 L/min at 375 mmHg (21ft3/hr at 14.77" Hg)

Robot: 10 L/min at 635 mmHg (21 ft3/hr at 25" Hg)

Prealigner: 304.80 mmHg (12" Hg)
Compressed air (input) Load Port: Min. 60 psi, Max. 145 psi (relative) oil-free, purified >5 µm

Consumption: <1 m3/h for 10 cycles/hour

Connection: One-touch fitting for ¼" tubing

Robot: None Required
Ambient Conditions: Temperature:

Operation: +15 to +25°C (58 to 77°F)

Transport: -25 to +55°C (-13 to 181°F)

Humidity:

Operation: 10% to 95% relative humidity

Transport: 5% to 95% relative humidity
Cleanliness: ISO Class 1
Communication: RS232 or TCP/IP 
Compliance:
E1.9 300 mm Cassette
E15.1 300 mm Tool Load Port
E47.1 300 mm Boxes and Pods
E57 Kinematic Couplings
E62 300 mm FIMS
E63 BOLTS Interface
E64 300 mm Cart Docking
E84 AMHS Parallel I/O Interface
E99 CIDRW
F47 Electrical Voltage Sag Standard
S2/S8/S14 Safety Guidelines
CE EMC, LVD, and MD Directives

*Dimensions vary depending on customer's order