Linear Tracks

General Info

The Linear Track is designed to mobilize the Wafer Handling robot. It can be installed either under the wafer handler or lateral to it.

The Linear Track uses brushless servo motors for smooth, dynamic movement. The length of the track can be customized to any order.

Specification:

Repeatability TBD
Standard Axes Working Ranges 600 mm, 1260 mm, 2550 mm
Payload For all Diamond Robots
Maximum Acceleration TBD
Power Supply 110 / 230 V AC
Main Interface RS-232 [Db9]

Option: Ethernet [RJ-45]