Diamond E5 - Wafer Cassette Load Station (Elevator)

Wafer Size 2” (50mm) to 12” (300mm)

Payload 25 kg (55.1 lbs)

Encoders Incremental, 10000 pulse/rev on motor shaft Motor type Brushless, low inertia high response

Weight 21 kg (46.5 lbs)

Cleanliness Class 1 clean room environment compatible

Operating temperatures 50°F-104°F (10°C to 40°C)

Facility requirements Voltage range 100-120AVC, 200-240VAC