Wafer Handling products

Milara Inc. offers a full line of industry leading semiconductor wafer handling robots in extended ISO Class 1 cleanroom applications. Exceptional accuracy, repeatability, reach, throughput, along with a comprehensive portfolio of flexible end effectors, aligners and payload options make these robots ideal for handling all wafer sizes, thin or bonded wafers, and specialized wafer carriers.

Diamond H1

The cost-effective Atmospheric Wafer Handling Robot for efficient work.Diamond H1

Diamond H3Diamond H3

The most popular Atmospheric Wafer Handler with all of the standard features included.

Diamond H4Diamond H4

The dual-arm, atmospheric Wafer Handler for high performance, heavy duty, and specialized work.

Diamond H5Diamond H5

For the latest in vacuum transport technology and load lock applications. These Wafer Handling Robots are the most cost effective solutions in the marketplace and can be built to fit customer specific requirements.

Diamond E5

Elevator for loading and unloading wafers into vacuum processing tools.Diamond E5

Linear TracksLinear Tracks

A one axis track for mobilizing the robot either horizontally or vertically. It comes in varying lengths to meet customer requirements.

Diamond EFEM

(Equipment Front End Module) A self-contained mini-environment designed to meet SEMI and ISO specifications.Diamond EFEM

AXM 100

industry-standard ATM 100 series of clean-room-compatible wafer handling robots. The low-inertia design allows rapid motion with no sensitivity loss within the closed-loop DC servo system. Compact dimensions enable the robot to fit into smaller footprints.AXM 100

AXM 400

Atmospheric Bottom Mount (ABM)-400 and Atmospheric Top Mount (ATM)-400 Class 1 cleanroom compatible wafer handling robots are designed to handle wafers up to 300mm in diameter.AXM 400


Designed specifically for the simultaneous handling of two wafers, this robot features two independent Radial axes. Two integral end-effectors allow a pre-aligned wafer to be exchanged with a processed wafer 25% faster than a dual paddle robot.DBM

PRE 200

Wafer Pre-Aligner combines a high-resolution optical system with high-precision mechanics to yield great overall performance.PRE 200

PRE 300

The PRE-300 Wafer Pre-Aligner combines high-resolution optical sensing with high-precision mechanics to yield great overall performance.PRE 300


The TRA series linear track, featuring a unique modular design can be easily integrated into any application where parallel 300mm load ports, 200mm SMIF modules, or process chambers are configured.Tracks


TouchPrint Automatic Inline - Series Products


TD2929-3D CyberOptics Model


Incorporating the CyberOptics SE 500 (latest in their technology) inspection head, this series boasts high speed concurrent processing with added 3D 100% post print inspection feature.TD2929-3D


TD2929-DOT Model (Integrated dot dispensing)

Developing software specific to CAD, Gerber, DXF and other PCB file formats, with the latest in software development tools, this series utilizes the innovation in dispensing technology provided by Asymtek. The systems initial roll0-out utilizes the SV-100 solder paste slider valve but can be fitted with other fine Asymtek products for glue dispensing a variety of materials.


TD2929-E Model (Essentials)


Essentials means simply everything you need to get your production line up and running quickly and cost effectively. This system incorporates the same motion and vision control technology without the options needed for 3D or dot dispensing.TD2929-E Model (Essentials)





SemiTouch ST2929 Semi Automatic Batch Printer

Manual vision twin camera option batch printer with bottom side ultrasonic stencil cleaner, dual loop servo axis positioning (highest accuracy X, Y and Theta alignment) with NO more Mylar test print setup feature. A microscope camera is now used to align the PCB THROUGH the stencil.

SemiTouch ST2929 Semi Automatic Stencil Printer

SemiTouch STAV Semi Automatic Batch Printer

The STAV has all of the same features and functions of the ST2929 with the exception of automatic vision alignment. Milara employs a dual servo loop positioning feedback system to ensure the highest accuracy for automatic X, Y and Theta vision PCB alignment.

SemiTouch STAV




MiniTouch MT2020 Semi Automatic Stencil Printer

Single closed loop servo axis system. Pneumatic print shuttle transfers the PCB under the print area. Vibration squeegee technology is employed with closed loop computerized print pressure and a manual vision alignment system with SemiIntel™ vision lockout feature.MiniTouch MT2020 Semi Automatic Stencil Printer