Diamond E5 - Wafer Cassette Load Station (Elevator)

Wafer Size
2” (50mm) to 12” (300mm)

Payload
25 kg (55.1 lbs)

Encoders
Incremental, 10000 pulse/rev on motor shaft

Motor type
Brushless, low inertia high response

Weight
21 kg (46.5 lbs)

Cleanliness
Class 1 clean room environment compatible

Operating temperatures
50°F-104°F (10°C to 40°C)

Facility requirements
Voltage range
100-120AVC, 200-240VAC