Robotics

Milara has partnered with a servo robotics design company to now offer high end robotic positioning, handling and pre-alignment equipment. Using the same precision servo motion control hardware used in its printer products, Milara is proud to offer this technology for individualized robotic motion control applications.

These robots are an innovative design and are class-1 clean room compatible. The modular concept guarantees a maximum of flexibility and capability. These innovative handling solutions are designed to handle wafers and masks and feature extremely high precision and reliability. Brushless motors with extreme high reaction capability, coupled with direct driven Harmonic Drive® gears guarantee precise, dynamic and trouble free arm movements. The advanced servo controllers provide for a seamless integration of linear tracks and other peripherals. The robotic controllers ensure smooth running along multiple path segments. The efficient wafer operation and script programming language provides for optimal emulation of third party software enabling the seamless integration of most semiconductor tools.

The Milara prealigners are innovative, high precision, class 1 compatible prealigner solutions including scanning electronics, motion controller and power supply within an industry standard footprint. All axes are servo driven and equipped with ultra low inertia brushless motors for smooth, instant response. The advanced scanning heads are capable of detecting transparent, semi-transparent and opaque objects with diameters of 2“(50 mm) up to 12“(300 mm) without repositioning between different wafer sizes. Furthermore the alignment of masks, wafers without notch/flat, wafers with two or more flats as well as other substrates, for example, is supported. The built-in intelligent motion controllers feature a comprehensive set of commonly used commands to allow the seamless integration of the prealigners in a variety of semiconductor platforms. The unprecedented aligning cycle time of less than 3.5 seconds allows achieving maximum throughput.

Milara end effectors. Below are various wafer handling end effectors also available.

Characteristics		Options
For wafer sizes up to 12" (300 mm) Modular concept Low own weight High rigidity Good cost/performance ratio		Diverse wafer mapping sensors Several surface coatings Special designs
	Paddle without Scanner		Paddle with Scanner
	Horse shoe without Scanner		Horse shoe with Scanner
	Edge gripper