Linear Tracks
Linear Tracks
General Info:
The Linear Track is designed to mobilize the Wafer Handling robot. It can be installed either under the wafer handler or lateral to it.
The Linear Track uses brush-less servo motors for smooth, dynamic movement. The length of the track can be customized to any order.
Features:
Excellent structural rigidity, modular and highly customizable design, linear travel 31” or more, custom length is also available!
Standard RS-232 interface and Ethernet (Telnet) interfaces to the host computer.
Compact footprint, Class 1 clean-room environment compatibility.
Reliability – MTBF > 60,000 hours, (MCBF > 10, 000, 000 cycles).
Easy macro programming, Time Optimized Trajectory software, seamless integration with Diamond series Robots, Pre-Aligners and other components all add up to the new standard in automation.
Specification:
Repeatability | TBD |
---|---|
Standard Axes Working Ranges | 600 mm, 1260 mm, 2550 mm |
Payload | For all Diamond Robots |
Maximum Acceleration | TBD |
Power Supply | 110 / 230 V AC |
Main Interface |
RS-232 [Db9] Option: Ethernet [RJ-45] |
K Axis, Range |
31″Inches or more |
K Axis, Max Speed |
70 Inch/s |
K Axis, Repeatability |
±0.001”(0.025mm) |