Linear Tracks

Linear Tracks

General Info:

The Linear Track is designed to mobilize the Wafer Handling robot. It can be installed either under the wafer handler or lateral to it.

The Linear Track uses brush-less servo motors for smooth, dynamic movement. The length of the track can be customized to any order.

Features:

Excellent structural rigidity, modular and highly customizable design, linear travel 31” or more, custom length is also available!
Standard RS-232 interface and Ethernet (Telnet) interfaces to the host computer.
Compact footprint, Class 1 clean-room environment compatibility.
Reliability – MTBF > 60,000 hours, (MCBF > 10, 000, 000 cycles).

Easy macro programming, Time Optimized Trajectory software, seamless integration with Diamond series Robots, Pre-Aligners and other components all add up to the new standard in automation.

Specification:


Repeatability TBD
Standard Axes Working Ranges 600 mm, 1260 mm, 2550 mm
Payload For all Diamond Robots
Maximum Acceleration TBD
Power Supply 110 / 230 V AC
Main Interface

RS-232 [Db9]

Option: Ethernet [RJ-45]

K Axis, Range

31″Inches or more

K Axis, Max Speed

70 Inch/s

K Axis, Repeatability

±0.001”(0.025mm)
@3σ

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