2 Port Milara EFEM
The EFEM (Equipment Front End Module)
is a class 1 mini-environment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation.
The Load Port is modular and can seamlessly integrate to the OEM process tools. Milara EFEMs can be customized to meet the automation requirements of any semiconductor manufacturing facility, adding stations such as pre-aligners and OCR.
Capable of handling various wafer sizes with 1-4 load ports or custom cassette holders. Diamond EFEMs are built to
customer specification to meet specific system and layout requirements.
Features:
Integrated design for easy setup and installation, speeding tool qualification Excellent structural rigidity, Highly customizable design, SEMI BOLTS interface, Class 1 clean-room environment compatibility, Fully compliant with SEMI standards
Front mount access for fast and easy serviceability, Support for 200mm and 300mm wafers, 2,3 and 4 Load Port configuration
Milara Diamond H3 & H4 Robots, Process independent modular design, Recipe driven Diamond Commander Software,
Optional SECS/GEM interface, Monitor and Keyboard on Ergotron Arm, Full line of Wafer Aligners, Mapping Sensor, Light tower
Reliability – MTBF > 60,000 hours, (MCBF >10,000,000
Specification:
| 2 Wide EFEM
Dimensions*: |
Height: 65″ (1650 mm) Width: 50″ (1270 mm) Depth: 44.22″ (1125 mm) |
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| Electrical Power Supply: |
110-240V (AC) Minimum of 3.0kVA capacity, 50/60 Hz 1-phase |
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| Vacuum: |
Load Port: Min. 60 psi, Max 145psi. L/min at 375 mm Hg (21ft3/hr at 14.77″ Hg) Robot: 10 L/min at 635 mmHg (21 ft3/hr at 25″ Hg) Prealigner: 304.80 mmHg (12″ Hg) |
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| Compressed air (input) |
Load Port: Min. 60 psi, Max. 145 psi (relative) oil-free, purified >5 µm Consumption: <1 m3/h for 10 cycles/hour Connection: One-touch fitting for ¼” tubing Robot: None Required |
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| Ambient Conditions: |
Operation Temperature: +15 to +25°C (58 to 77°F) Transport Temperature: -25 to +55°C (-13 to 181°F) Operation Humidity: 10% to 95% relative humidity Transport Humidity: 5% to 95% relative humidity |
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| Cleanliness: | ISO Class 1 | ||||||||||||||||||||||||||||||||||||||||||||||||
| Communication: | RS232 or TCP/IP | ||||||||||||||||||||||||||||||||||||||||||||||||
| Compliance: |
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