Diamond series atmospheric robots represent a
significant engineering advancement in the design
and reliability of wafer handling equipment.
Benefiting from technologically superior
components, the robots utilize ultra low inertia,
high-response brushless servomotors coupled with zerobacklash
Harmonic Drive® gears to achieve greatly enhanced
dexterity and precision.
The innovative, all-in-one, class 1 clean room compatible
design incorporates the motion controller, servo amplifiers, and
power supply within the robot’s industry standard footprint.
High-strength structural members enable top, bottom or side
mount configurations without compromising the system
A 32-bit, real-time kernel delivers accurate motion profiling
along smooth continuous trajectories, while the distributed
control architecture allows a seamless integration with linear
tracks, pre-aligners, and other sub-components.
Networkable RS-485 and Ethernet interfaces complement the
standard RS-232 and teach pendant connections. Powerful
native wafer handling and scripting languages facilitate rapid
software development for embedding the robots into an OEM
application environment. Comprehensive emulation of legacy
robot “macro” commands offers a drop-in compatibility with
a wide variety of existing semiconductor tools.
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