The Linear Track is designed to mobilize the Wafer Handling robot. It can be installed either under the wafer handler or lateral to it.
The Linear Track uses brush-less servo motors for smooth, dynamic movement. The length of the track can be customized to any order.
Excellent structural rigidity, modular and highly customizable design, linear travel 31” or more, custom length is also available!
Standard RS-232 interface and Ethernet (Telnet) interfaces to the host computer.
Compact footprint, Class 1 clean-room environment compatibility.
Reliability - MTBF > 60,000 hours, (MCBF > 10, 000, 000 cycles).
Easy macro programming, Time Optimized Trajectory software, seamless integration with Diamond series Robots, Pre-Aligners and other components all add up to the new standard in automation.
|Standard Axes Working Ranges||600 mm, 1260 mm, 2550 mm|
|Payload||For all Diamond Robots|
|Power Supply||110 / 230 V AC|
Option: Ethernet [RJ-45]
|K Axis, Range||
31"Inches or more
|K Axis, Max Speed||
|K Axis, Repeatability||