General Info:The Linear Track is designed to mobilize the Wafer Handling robot. It can be installed either under the wafer handler or lateral to it. The Linear Track uses brush-less servo motors for smooth, dynamic movement. The length of the track can be customized to any order.
Features:Excellent structural rigidity, modular and highly customizable design, linear travel 31” or more, custom length is also available! Standard RS-232 interface and Ethernet (Telnet) interfaces to the host computer. Compact footprint, Class 1 clean-room environment compatibility. Reliability - MTBF > 60,000 hours, (MCBF > 10, 000, 000 cycles). Easy macro programming, Time Optimized Trajectory software, seamless integration with Diamond series Robots, Pre-Aligners and other components all add up to the new standard in automation.
|Standard Axes Working Ranges||600 mm, 1260 mm, 2550 mm|
|Payload||For all Diamond Robots|
|Power Supply||110 / 230 V AC|
|Main Interface||RS-232 [Db9] Option: Ethernet [RJ-45]|
|K Axis, Range||31"Inches or more|
|K Axis, Max Speed||70 Inch/s|
|K Axis, Repeatability||±0.001”(0.025mm) @3σ|