EQUIPE AXM 400
General Specifications:
- Payload 404 405 407 407B 407C ~ 1 lb. 1 lb. 1 lb. 1.5 lbs 4 lbs
- Droop 0.020” for rated payloads Z
- Drop .010” in the event of a servo off with brake.
- Noise Shall not exceed 72dB at 400 to 20000 Hz with 1001-0430 lead screw Substrate sensors.
- Vacuum Throughput < 4 seconds / wafer / pick and place.
- Cleanliness Class 1 compatible.
- Weight 60 lbs.
- Vacuum required 18-24 inches Hg.
- Power required 100-240 VAC, 50/60 Hz.
- MTBF 75,000 Hrs.
Mounting Specifications:
- Robot Holes Spacing Diameter 11.500”
- Robot Bolt Pattern 3 x 0.25” thru on dia. 12.350″
- End Effector 4 x 4-40 on dia. 1.390″ (404, 405, 407) 4 x 6-32 on dia. 2.000” (407B, 407C) Dead Zone 25° Dead Zone.
Features:
Robot mechanics are free of backlash, providing highly repeatable positioning. All system parts are located below the wafer plane, minimizing particulate contamination. Low-inertia design allows rapid motion with no sensitivity loss within the
closed-loop DC servo system.
Highly configurable to accommodate a variety of application requirements.
Built-in reliability and high ESD immunity tolerance ensure dependable operation for many years.
Specification:
Axis | Range of Motion | Repeatability(Typical) | Speed(Typical) |
---|---|---|---|
T | 335° | ± 0.02° @3 σ | 360°/sec |
R | 2 x (5.25” or 7.20”) | ± 0.02″ @3 σ | 24 inches/sec |
Z | 13,2” | ± 0.02″ @3 σ | 10 inches/sec |