2 Port Milara EFEM

The EFEM (Equipment Front End Module)

is a class 1 mini-environment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation. The Load Port is modular and can seamlessly integrate to the OEM process tools. Milara EFEMs can be customized to meet the automation requirements of any semiconductor manufacturing facility, adding stations such as pre-aligners and OCR. Capable of handling various wafer sizes with 1-4 load ports or custom cassette holders. Diamond EFEMs are built to customer specification to meet specific system and layout requirements.

Features:

Integrated design for easy setup and installation, speeding tool qualification Excellent structural rigidity, Highly customizable design, SEMI BOLTS interface, Class 1 clean-room environment compatibility, Fully compliant with SEMI standards Front mount access for fast and easy serviceability, Support for 200mm and 300mm wafers, 2,3 and 4 Load Port configuration Milara Diamond H3 & H4 Robots, Process independent modular design, Recipe driven Diamond Commander Software, Optional SECS/GEM interface, Monitor and Keyboard on Ergotron Arm, Full line of Wafer Aligners, Mapping Sensor, Light tower Reliability – MTBF > 60,000 hours, (MCBF >10,000,000

Specification:


2 Wide EFEM Dimensions*:

Height: 65″ (1650 mm)

Width: 50″ (1270 mm)

Depth: 44.22″ (1125 mm)

Electrical Power Supply:

110-240V (AC) Minimum of 3.0kVA capacity, 50/60 Hz 1-phase

Vacuum:

Load Port: Min. 60 psi, Max 145psi.  L/min at 375 mm Hg (21ft3/hr at 14.77″ Hg)

Robot: 10 L/min at 635 mmHg (21 ft3/hr at 25″ Hg)

Prealigner: 304.80 mmHg (12″ Hg)

Compressed air (input)

Load Port: Min. 60 psi, Max. 145 psi (relative) oil-free, purified >5 µm

Consumption: <1 m3/h for 10 cycles/hour

Connection: One-touch fitting for ¼” tubing

Robot: None Required

Ambient Conditions:

Operation Temperature: +15 to +25°C (58 to 77°F)

Transport Temperature: -25 to +55°C (-13 to 181°F)

Operation Humidity: 10% to 95% relative humidity

Transport Humidity: 5% to 95% relative humidity

Cleanliness: ISO Class 1
Communication: RS232 or TCP/IP
Compliance:
E1.9 300 mm Cassette
E5 SEMI Equipment Communications Standard 2 Message Content (SECS-II)
E15.1 300 mm Tool Load Port
E30 Generic Equipment Model (GEM)
E37 High-Speed SECS Message Services (HSMS)
E39 Object Services Standard: Concepts, Behavior, and Services
E40 Standard for Processing Management
E47.1 300 mm Boxes and Pods
E57 Kinematic Couplings
E62 300 mm FIMS
E63 BOLTS Interface
E64 300 mm Cart Docking
E84 AMHS Parallel I/O Interface
E87 Carrier Management System (CMS)
E90 Substrate Tracking (CTS)
E94 Control Job Management (CJM)
E95 Unified user interface (UI)
E99 CIDRW
E116 Equipment Performance Tracking (EPT)
E120 Common Equipment Model (CEM)
E132 Equipment Client Authentication and Authorization (CA&A)
E134 Data Collection Management (DCM)
S2/S8/S14 Safety Guidelines
CE EMC, LVD, and MD Directives

 

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