EQUIPE Atmospheric Linear Track
General Info
The TRA series linear track, featuring a unique modular design can be easily integrated into any application where parallel 300mm load ports, 200mm SMIF modules, or process chambers are configured.
The TRA series track provides the robot with an independent fourth axis that enables straight line wafer transfer motions. This simple Cartesian coordinate system can be quickly taught using advanced EQT software.
- Range of Motion 22″ to 62”
- Repeatability ± 0.001″ @ 3 sigma
- Average Speed (ABM-407 payload)
TRA-036-LPS 18”/sec.
TRA-076-LPS 32”/sec. - MTBF >28,000 hours.
Specification:
| Effective Stroke DBM robot (D) | 22 |
|---|---|
| Effective Stroke ABM robot (S) | 23.8 |
| Rail Length | 36.0 |
| Overall Length | 40.2 |
| Overall Width | 17.0 |
| Weight | 130lbs. |
| E-15.1 PDO capacity | 2 |
| Effective Stroke DBM robot (D) | 62 |
|---|---|
| Effective Stroke ABM robot (S) | 63.1 |
| Rail Length | 76.0 |
| Overall Length | 80.2 |
| Overall Width | 17.0 |
| Weight | 206lbs. |
| E-15.1 PDO capacity | 4 |