The latest generation high-throughput wafer sorting
platform from Milara Inc. It brings to market
innovative and fully automated cassette stations,
which provide a complete system from the loading of
new substrates through the unloading of processed
substrates without interrupting the robot cycle. This enables
unparalleled processing throughput of more than 220 wafers per
A modular design allows for the processing of up to 20 carriers
simultaneously and central to the system is Milara’s Diamond
H4 dual-arm robot for rapid wafer swapping.End effectors on
the robot include integrated through-beam sensors for quick
and reliable wafer mapping, reporting occupied or empty slots,
and identifying cross-slotted substrates.
Fully integrated precision wafer handling components include
an autonomous prealigner to center wafers with 25 micron
accuracy, an optical character reader to reliably track ID’s on both
sides of the substrate, and high-precision digital scales capable
of measuring a wafer in one half of a second with 1 milligram
resolution. All components of the system are Class 1 compatible
and a quiet fan filter built into the mini-environment provides
laminar flow for maximum cleanliness.
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