DBM Atmospheric Robot
General Specifications:
- Payload (each arm) 1 lb. (.45kg)
- Wafer Size: 200mm-300mm (Standard)
- Weight: 90 lbs. (41kg)
Utilities Required:
- Vacuum: 18-24 inches Hg
- Input Voltage: 100/120/220/240 VAC, 50/60 Hz.
- Throughput: ≤ 3 seconds / per wafer swaps.
Mounting Specifications:
- Mounting Holes: 4 x .375” thru holes.
- Mounting Holes: Spacing 11.75″.
- End Effector Mounting: 4 x 6-32, 1.00” spacing
- Dead Zone: N/A
Features:
Optimized for fast wafer swaps Standard Integral horseshoe end effectors.
Two independent Radial Axis, High throughput, Full 360° theta rotation eliminates dead zone
Improved stiffness and orthogonality Cassette mapper (optional) CE Mark (standard) and SEMI S2 Compliant
Specification:
Axis | Repeatability | Speed | Motion range (2406) | Motion range (2407) |
---|---|---|---|---|
T | + 0.01 | 360°/sec | 360° | 360° |
R | < ± 0.002″ | 24 inch/sec | 11.68” | 14.50” |
Z | ± 0.001″ | 12 inch/sec | 12.96″ | 12.96″ |