EQUIPE AXM 100
General Specifications:
- Payload: 1 lb.
- Substrate Sensors: Vacuum, Laser Cassette Mapping Optional.
- Cleanliness: Class 1 (with fan Option).
- Weight: ATM 100, 28 lbs.
- Utilities Required: Vacuum 18-24 inches Hg, Power 100 – 240 VAC, 50/60 Hz.
- Throughput: < 4 seconds / wafer / pick and place (transfer).
- MTBF: 75,000 Hrs.
Mounting Specifications:
- Robot Hole Diameter: 8.500″
- Robot Bolt Pattern: 3×1/4-20 on dia. 9.000″
- End Effector: 4×4-40 on dia. 1.390″
- Dead Zone: 25° Dead Zone
- Canister: Minimum space required: 16.500″ Canister diameter: 8.000″
Features:
Compact footprint, Highly repeatable positioning, Available with CE Mark
High ESD tolerance, Macro programmable, MIntelligent commands
S2-93A Ready
Specification:
Axis | Range of Motion | Repeatability(3 Sigma) | Speed |
---|---|---|---|
T | 335° | ± 0.02° | 360°/sec |
R | 2 x (4.45″, 5.25″ or 7.2″) | ± 0.002″ | 24 inches/sec |
Z | 7″ATM-100 | ± 0.002″ | 12 inches/sec |