Equipe Series atmospheric robots represent the world
standard of wafer handling atmospheric robots.
Designed for superior performence and reliability,
the Equip Series are a cost-effective solution to your
Robust, balanced design is central to the outstanding
performance of these systems. Large motors and smooth
antibacklash transmissions allow rapid motion with no
sensitivity loss within the closed-loop DC servo system. No
motors, belts or pulleys are exposed above the mounting
surface at any time, keeping particulate contamination to a
The innovative, all-in-one, class 1 clean room compatible
design incorporates the motion controller, servo amplifiers, and
power supply within the robot’s industry standard footprint.
High-strength structural members enable top, bottom or side
mount configurations without compromising the system
A 32-bit, real-time kernel delivers accurate motion profiling
along smooth continuous trajectories, while the distributed
control architecture allows a seamless integration with linear
tracks, pre-aligners, and other sub-components.
Of course, the Equipe robots have all the quality and features
you’ve come to expect from Milara® wafer handling robots.
Easy macro programming, Time Optimized Trajectory software,
the most reliable cassette mappers (optional) and seamless
integration with Linear Tracks, Pre-Aligners and other
components all add up to the new standard in automation.
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